NEWS: ProSys Announces Replacement for legacy Verteq/Marteq Megasonic Sunburst. Find out more!

Published Papers

ProSys Megasonics leads with innovation, working alongside top companies and research institutions. Our published papers reflect this commitment to industry leadership and collaborative progress.

Megasonic Technology

Dive into the forefront of megasonic technology with ProSys Megasonics' specialized research. Our papers detail groundbreaking methods and revolutionary applications, now available exclusively upon request. Here's a glimpse of the topics we cover:

  • Supramolecular assemblies enhancing shallow trench isolation cleaning
  • Novel sono-electrochemical techniques for particle removal
  • Innovative solvent-free phase-fluids for wafer resist processing
  • Advanced photoresist stripping methods using DiO3
  • Simplified cavitation for analyzing sonoluminescence in megasonic-treated solutions
  • Process control advancements in megasonic-enhanced pre-bonding cleaning
  • Efficiency comparisons between direct and indirect megasonic tank systems
  • Acoustic energy applications in MEMS manufacturing
  • Aligned wafer bonding techniques for CMOS-MEMS and 3D integration
  • Control and reduction of wafer damage with CO2-enriched deionized water

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For full access to our research, please get in touch with us directly at ProSys Megasonics.