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  section title: Products
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Direct Megasonic Batch Systems

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batch systems images
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ProSys Direct Megasonic Systems offer uniform, controlled Megasonic energy that enhances the action of your cleaning chemistry. These systems also provide lower cost of ownership. No degassed DIW is needed and electrical costs are 55% lower than indirect systems. Cleaning results are guaranteed to equal Process of Record.
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Features / Benefits
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Direct Megaonic Systems consistently demonstrate improved cleaning uniformity for both each wafer and across the cassette.
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  Sonic field uniformity of +/- 2 dB vs. legacy systems at +/- 18 dB
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  98+% PRE and increased device yield
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These systems offer lower cost of ownership, both initial capital cost and operating cost.
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  Patented bonded Array Assembly with integral matching network
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  No need for coupling DIW
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  74% energy transmission into cleaning fluid means electricity costs 55% lower than indirect systems
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  Common failure modes of competing products are eliminated, resulting in greater system availability and longer service life
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They are designed for drop-in replacement of legacy systems.
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  Standard sizes designed for 150mm, 200mm, and 300mm wafer processing
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  Single wafer, single 25-wafer cassette and dual 25-wafer models
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  Custom sizes
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  Replaceable and repairable transducer arrays
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Selected Technical Specifications

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Nominal operating frequency of 925 KHz
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Power densities up to 1.5 Watts/cm2
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Process fluid temperatures to 60°C
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All-quartz or all-316L SS wetted surfaces
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4-sides weir overflow
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<empty> For full specs, please see product note.


 
Quick Response
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Contact Us
for quick response on a quote or for additional product information
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Technical Information
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Specifications
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Product Note
with technical specifications and drawings (PDF)
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Related Products
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IMPulse RF Power Supply with Integrated Microcontroller
info
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Megasonic Tank Options info
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Custom Megasonic Cleaning Systems info
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ProSys Direct Megasonic System
with Patented Array Technology Delivers the Results You Need.

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Improved device yield, lower cost
of ownership, and competitive
capital expenditure all add up to
an attractive payback.

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learn more

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