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ProSys brings Megasonics to the laboratory table top. This small compact system allows a researcher to experiment with Megasonic acoustic energy at a fraction of the cost. The versatile ProSys Table Top Megasonic cleaner can clean a wide variety of components. The cleaning chemistry is filtered and recirculated. This is the perfect tool for Megasonic process development and experiment.
- Tabletop Megasonic System
- Stainless Steel tank
- Single Wafer, Die Or Special Parts Cleaning
- LCD Touch Screen Operator Control Panel
- 200mm Capable
- Recirculated And Filtered
- 400 KHz, 1, 2 or 3 MHz Options Available
Options
- Temperature Control to 60° C
- Quartz Insert for Strong Acid and Base Use
- Kynar Tank
U.S. Referenced Patents
6,047,246 – Computer Controlled Ultrasonic Cleaning System
6,188,162 – High Power Megasonic Transducer
6,222,305 – Chemically Inert Megasonic Transducers
6,431,908 – Method for Spring Contact & Matching Megasonic Transducers
6,549,860 – Method and Apparatus for Tuning a Megasonic Transducers
6,904,921 – Indium or Tin Bonded Megasonic Transducer Systems
Foreign Referenced Patens
162149 – Chemically Inert Megasonic Transducers – Taiwan
200200844-9 – Chemically Inert Megasonic Transducers - Singapore
10-0681071 – Chemically Inert Megasonic Transducers - Korea
System and Tank
- Small Compact Tank for Reduced Chemical Usage
- Stainless Steel or Kynar Tank with Quartz Insert Option
- Wafer Size up to 200mm
- Unit is 24”W x 14”H x 20”D
Transducer Array and Controls
- Patented Transducer and Controls Technology
- 400 KHz to 1, 2, or 3 MHz
- Operating Temperatures to 60° C
- 200 Watt RF Power Supply
- Custom Part Fixtures Available
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