ProSys brings Megasonics to the Laboratory table top. This small compact system enables a researcher to experiment with Megasonic acoustic energy at a fraction of the cost. This versatile Megasonic cleaner can clean a wide variety of substrates one at a time. The complete package includes the Single Substrate Cleaner, Electronics Package, installation drawings and a user manual.
- Single Substrate Custom Tanks
- Quartz, Kynar or Stainless Steel Materials
- Wafer to 450mm, Custom to 1000mm
U.S. Referenced Patents
6,188,162 – High Power Megasonic Transducer
6,222,305 – Chemically Inert Megasonic Transducers
6,431,908 – Method for Spring Contact & Matching Megasonic Transducers
6,904,921 – Indium or Tin Bonded Megasonic Transducer Systems
7,145,286 – Indium or Tin Bonded Transducers >2MHz
6,047,246 – Computer Controlled Ultrasonic Cleaning System
6,549,860 – Method and Apparatus for Tuning a Megasonic Transducers
6,722,379 – Quartz Megasonic Tank System
Foreign Referenced Patents
162149 – Chemically Inert Megasonic Transducers – Taiwan
200200844-9 – Chemically Inert Megasonic Transducers – Singapore
10-0681071 – Chemically Inert Megasonic Transducers - Korea
Tank
- Small, compact size
- Kynar®, Quartz, and Stainless Steel tanks available
- Wafer size up to 450mm
- Four sided overflow standard
Transducer Array
- Patented Transducer Technology
- Quartz, Sapphire, Stainless Steel, PFA coated and other resonator materials available
- Repairable
- Continuous Operation with Pulsing available
- Operating temperatures to 60° C
- Interfaces with ProSys' Mega and Micro series electronics
packages
- Custom sizes available
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