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Mark-I Standalone Megasonic Cleaner

The ProSys Plate Arrays are engineered for ease of use and ease of installation. The plate arrays are designed so they can be attached to a custom tank and integrated into an already existing product. These reliable and highly versatile arrays are available in custom sizes and construction materials. The complete package includes the Plate Array, Electronics Package, installation drawings and a user manual.

  • Custom Transducer For Your Tank Designs
  • Single Wafer To 450mm Batch
  • Easy To Install And Repair
  • Continuous Or Pulsed Operation

U.S. Referenced Patents
6,188,162 – High Power Megasonic Transducer
6,222,305 – Chemically Inert Megasonic Transducers
6,431,908 – Method for Spring Contact & Matching Megasonic Transducers
6,904,921 – Indium or Tin Bonded Megasonic Transducer Systems
6,946,774 – Segmented Uniform Energy Megasonic Transducer
7,145,286 – Indium or Tin Bonded Transducers >2MHz

Foreign Referenced Patents
162149 – Chemically Inert Megasonic Transducers – Taiwan
200200844-9 – Chemically Inert Megasonic Transducers – Singapore
200402092-1 – Radial Power Megasonic Transducer - Singapore
10-0681071 – Chemically Inert Megasonic Transducers - Korea

Specifications

  • Mark-I Standalone Megasonic CleanerQuartz, Stainless Steel, PFA Coated Stainless Steel, Sapphire, Ceramic, and Other Resonator Materials Available
  • Standard Sizes for Single and Dual 150mm, 200mm, 300mm and 450mm
  • Single substrate 150mm, 200mm, 300mm and 450mm Standard
  • Continuous or Switched Operation with Pulsing
  • Sealed and Ready to Mount to your Tank
  • Operating Temperatures to 60° C
  • Interfaces with ProSys Mega and Micro Series Electronics Packages
  • Custom Sizes Available
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