Power Density: 

0.1-3.0 Watts/cm²

Frequency Range: 

1 or 2 MHz

Mounting Height: 

0.020” – 0.140” (0.5-3.5mm) Above the Substrate

Fluid Temperature: 

80º C max

Transducer Material: 

Sapphire Resonator, PFA coated back

Dimensions: 

200mm Wafer Size

300mm Wafer Size

Head Height:

0.86” (22mm)

0.86” (22mm)

Max Width

2.78” (71mm)

3.80” (97mm)

Length:

4.47” (114mm)

6.44” (164mm)

Weight:

13 OZ. (283 gm)

24 OZ. (595 gm)

RF Power Connection:

15’ (4.6m) Cable, BNC Plug

Mounting: 

3x ¼-28UNF Female Thread

Purge Supply: 

N2 or CDA Purge, 25LPM Flow, ¼” Compression Fitting

Purge Return: 

¼” FEP Tube, 36” long, RF Power Cable enclosed

Control System: 

ProSys Micro Duo