Tank Systems Table Top Lab Tank MicroDuo Plate Arrays MegPie Transducer Immersible Array
HomeCompanyTechnologyNewsProductsMulti-Mode MegasonicDual Size MegPie3Rs - Repair, Rebuilds, & ReplacementssapphireMegPieMegPie TransducerTable TopTable TopTable TopImmersible ArrayMicroDuo Electronics PackageMegaDuoElectronicsPackageTank SystemsSingle Substrate CleanersPlate ArraysNew ProductsQuick Reply Custom Megasonics

Custom built arrays for difficult Megasonic applications and tight spaces from ProSys, Inc. This capability couples the innovation of Megasonic applications with the versatility to solve a variety of difficult cleaning problems. Megasonics can now be added or retrofitted to existing systems. Can be used horizontally, vertically, or other angles. The complete package includes the Custom Megasonic Transducer, electronics, installation drawings, and user manual.

  • Custom Single Wafer Transducers
  • Horizontal Or Parallel Operation
  • Easy To Integrate Into Your Tool Or Tank

U.S. Referenced Patents
6,188,162 – High Power Megasonic Transducer
6,222,305 – Chemically Inert Megasonic Transducers
6,431,908 – Method for Spring Contact & Matching Megasonic Transducers
6,904,921 – Indium or Tin Bonded Megasonic Transducer Systems
7,105,985 – Megasonics Transducer with a Focused Energy resonator
7,145,286 – Indium or Tin Bonded Transducers >2MHz

Foreign Referenced Patents
162149 – Chemically Inert Megasonic Transducers – Taiwan
200200844-9 – Chemically Inert Megasonic Transducers – Singapore
10-0681071 – Chemically Inert Megasonic Transducers - Korea

Specifications


Mark-I Standalone Megasonic Cleaner
  • Multiple or Single Crystal Custom Arrays
  • Stainless Steel, PFA Coated Stainless Steel, Quartz, Sapphire, Ceramic, and Other Resonator Materials Available
  • Repairable
  • Continuous or Switched Operation with Pulsing
  • Operating Temperatures to 60°C
  • Interfaces with ProSys Mega or Micro Series Electronics Packages
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