Tank Systems Table Top Lab Tank MicroDuo Plate Arrays MegPie Transducer Immersible Array
HomeCompanyTechnologyNewsProductsMulti-Mode MegasonicDual Size MegPie3Rs - Repair, Rebuilds, & ReplacementssapphireMegPieMegPie TransducerTable TopTable TopTable TopImmersible ArrayMicroDuo Electronics PackageMegaDuoElectronicsPackageTank SystemsSingle Substrate CleanersPlate ArraysNew ProductsQuick Reply Multi-Mode Megasonic

Multi-Mode Megasonic

  • Multiple Megasonic Frequency Operation
  • Simultaneous Different Frequency Operation
  • Sequential Different Frequency Operation
  • Direct acoustics
  • Indium bonded array, no epoxy used
  • Advanced controls with Data Logging

U.S. Referenced Patents
6,188,162 – High Power Megasonic Transducer
6,222,305 – Chemically Inert Megasonic Transducers
6,431,908 – Method for Spring Contact & Matching Megasonic Transducers
6,904,921 – Indium or Tin Bonded Megasonic Transducer Systems
7,145,286 – Indium or Tin Bonded Transducers >2MHz

Foreign Referenced Patents
162149 – Chemically Inert Megasonic Transducers – Taiwan
200200844-9 – Chemically Inert Megasonic Transducers – Singapore
200402092-1 – Radial Power Megasonic Transducer - Singapore
10-0681071 – Chemically Inert Megasonic Transducers – Korea

US Patents Pending

Specifications

System

  • Supplied with tank or Array Only
  • Custom sizes available for OEM’s
  • Advanced controls with analog or Ethernet control
  • Custom recipe management
  • Data logging of process operational parameters

Transducer Array

  • Multiple Frequencies in a single transducer
  • Simultaneous or Sequential Operation
  • 1-4KW of RF Power Available
  • Bolt-Up options Available
  • Operating temperatures to 60° C
  • Interface with ProSys MultiPulse Series electronics packages
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