Tank Systems Table Top Lab Tank MicroDuo Plate Arrays MegPie Transducer Immersible Array
HomeCompanyTechnologyNewsProductsMultiPulse MegasonicDual Size MegPie3Rs - Repair, Rebuilds, & ReplacementssapphireMegPieMegPie TransducerTable TopTable TopTable TopImmersible ArrayMicroDuo Electronics PackageMegaDuoElectronicsPackageTank SystemsSingle Substrate CleanersPlate ArraysNew ProductsQuick Reply Multi-Mode Megasonic

Multi-Mode Megasonic

 

Specifications

System

  • Supplied with Tank or Array Only
  • Custom Sizes Available for OEM’s
  • Advanced Controls with Analog or Ethernet Control
  • Custom Recipe Management
  • Continous or Pulsed
  • Data Logging of Process Operational Parameters

Transducer Array

  • Multiple Frequencies in a Single Transducer
  • Simultaneous or Sequential Operation
  • 1-4KW of RF Power Available
  • Multiple RF Power Supply Control
  • Bolt-Up Options Available
  • Operating Temperatures to 60° C
  • Interface with ProSys MultiPulse Series Electronics Packages

U.S. Referenced Patents
6,188,162 – High Power Megasonic Transducer
6,222,305 – Chemically Inert Megasonic Transducers
6,431,908 – Method for Spring Contact & Matching Megasonic Transducers
6,904,921 – Indium or Tin Bonded Megasonic Transducer Systems
7,145,286 – Indium or Tin Bonded Transducers >2MHz

Foreign Referenced Patents
162149 – Chemically Inert Megasonic Transducers – Taiwan
200200844-9 – Chemically Inert Megasonic Transducers – Singapore
200402092-1 – Radial Power Megasonic Transducer - Singapore
10-0681071 – Chemically Inert Megasonic Transducers – Korea

US Patents Pending

 
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