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The Dual Zone MegPie is a Patented Radial Megasonic Array designed to apply uniform acoustic energy to a rotating substrate.
- Process 2 Substrate Sizes With One Transducer
- 150/200mm, 200/300mm Or 300/450mm Option
- Patented Radial Uniformity
- Easy Integration Into Existing Tools
U.S. Referenced Patents
6,188,162 – High Power Megasonic Transducer
6,222,305 – Chemically Inert Megasonic Transducers
6,431,908 – Method for Spring Contact & Matching Megasonic Transducers
6,549,860 – Method and Apparatus for Tuning a Megasonic Transducers
6,791,242 – Radial Power Megasonic Transducer
6,882,087 – Uniform Energy Megasonic Transducer Using Vessel as Resonator
6,904,921 – Indium or Tin Bonded Megasonic Transducer Systems
6,946,774 – Segmented Uniform Energy Megasonic Transducer
7,141,917 – Wedge Shaped Uniform Energy Megasonics Transducer >2MHz
7,145,286 – Indium or Tin Bonded Transducers >2MHz
Foreign Referenced Patents
162149 – Chemically Inert Megasonic Transducers – Taiwan
200216 – Radial Power Megasonic Transducer - Taiwan
200200844-9 – Chemically Inert Megasonic Transducers – Singapore
200402092-1 – Radial Power Megasonic Transducer - Singapore
Power Density: |
0.1-2.0 Watts/cm² |
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Frequency Range: |
400 KHz, 1, 2, or 3 MHz |
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Mounting Height: |
0.020” – 0.140” (0.5-3.5mm) Distance Above Substrate |
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Fluid Temperature: |
60º C max |
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Transducer Materials: |
Sapphire Resonator with PEEK housing or all Stainless Steel |
Dimensions: |
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200mm Wafer Size |
300mm Wafer Size |
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Head Height: |
0.86” (22mm) |
0.86” (22mm) |
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Max Width |
2.78” (71mm) |
3.80” (97mm) |
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Length: |
4.47” (114mm) |
6.44” (164mm) |
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Weight: |
13 OZ. (283 gm) |
24 OZ. (595 gm) |
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RF Power Connection: |
15’ (4.6m) Cable, BNC Plug |
Mounting: |
M6 Female Thread |
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Purge Supply: |
N2 or CDA Purge, 10LPM Flow, ¼” Compression Fitting |
Purge Return: |
¼” FEP Tube, 36” long, RF Power Cable enclosed |
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Control System: |
ProSys Micro Duo |
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