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The 450mm MegPie is a Patented Radial Megasonic Array designed to apply uniform acoustic energy to a rotating substrate.
Power Density: |
0.05-2.0 Watts/cm² |
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Frequency Options: |
450 kHz 1, 2 or 3 MHz |
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Mounting Height: |
0.020” – 0.140” (0.5-3.5mm) Distance Above Substrate |
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Fluid Temperature: |
15º C - 60º C Range |
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Transducer Material: |
Sapphire, Quartz, or Stainless Steel Resonator, PEEK Housing, Perfluoroelastomer Seals |
Dimensions (not including fittings): |
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Head Height: |
0.86” (22mm) |
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Max Width |
3.80” (97mm) |
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Length: |
9.4” (239mm) |
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Weight: |
22 OZ. (610 gm) |
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RF Power Connection: |
15’ (4.6m) Cable, BNC Plug |
Mounting: |
3X M6 Female Thread |
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Purge Supply: |
N2 or CDA Purge, 10LPM Flow, ¼” Flared Fitting |
Purge Return: |
3/8” Teflon Tube, RF Power and temperature Sensor Cable enclosed |
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Control System: |
ProSys Micro Duo or ProSys Micro Duo 200 (Rack Mount) |
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