July 24, 2006
Product Systems Inc.
408-871-2500 (Voice)
408-871-2504 (Fax)
www.prosysmeg.com
Product Systems Inc., Defends Its Single Wafer Megasonic Technology
Campbell, CA July 24, 2006 - Product Systems Inc. (“ProSys”) has responded to a
patent infringement lawsuit filed by Akrion, Inc. (Case No. 2:06-CV-467 in the United
States District Court for the Eastern District of Pennsylvania) and filed a countersuit for
the infringement of a ProSys patent relating to Radial Uniform Megasonic Processing.
Megasonic processing has emerged as an increasingly important method of cleaning
contamination and damage sensitive products. Radial Uniform Megasonic exposure
helps improve the chemical and cleaning processes used while ensuring that every part
of the rotating substrate is exposed to the same amount of acoustic energy. ProSys
holds key patents in the area of Megasonic uniformity and Megasonic cleaning
generally. In fact, ProSys has 12 US and international Megasonic-related patents of its
own with 15 applications pending worldwide.
“ProSys has been designing, building, and patenting Megasonic Single Substrate
processing solutions since the late1990’s” said Mark J. Beck, ProSys’ CEO and founder.
“We do not copy, we innovate, and the market has responded to our ideas and products
in a very positive way.”
“We have advanced Megasonic Processing in the areas of transducer design, acoustic
uniformity, power control, and sonoluminescence metrology since our inception in 1996.
Our products are based upon our considerable intellectual property, not the ideas or
intellectual property of others. We will vigorously defend our intellectual property and our
customers’ rights to purchase and use the ProSys products.” said Mr. Beck.
About ProSys, Inc.
Founded in 1996, Product Systems Inc. (dba ProSys, Inc) delivers innovative Megasonic
technology with exceptional performance at a competitive cost to manufacturers of sub-
micron contamination-sensitive products. ProSys, Inc. is headquartered at 1745 Dell
Avenue in Campbell, California. Phone: 408-871-2500. Website: www.prosysmeg.com.
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