For Release July 15, 2004

CONTACTS: Janet Basler
Product Systems Inc.
408-871-2500 (Voice)
408-871-2504 (Fax)
sales@prosysmeg.com


PROSYS HAS RECEIVED U.S. Patent No. 6,791,242 for the "Radial Power Megasonics Transducer" MegPie™

Campbell, CA September 14, 2004 - ProSys Inc., the leader in advancing Megasonic cleaning technology and products, today revealed that they have received a U.S. Patent their core Radial Power MegasonicTechnology that is incorporated in the MegPieTM cleaning product line. This makes a total of 8 patents granted to ProSys for Megasonic Cleaning technology advancements.

"Our goal was to design a transducer that would provide a uniform field of acoustic energy to a rotating substrate in package that could integrate into any OEM’s tool and be adapted to tools in the field," said Mark Beck, founder and CEO of ProSys. "This transducer is a cost effective alternative that will enable Megasonics to be adapted to almost any spinning wafer"

The MegPie achieves radial power uniformity from center to edge with a variable watt density of 0 - 3 Watts/cm2. The transducer is HF, Solvent, and pH 1-13 compatible and can be purchased in standard sizes for cleaning 100mm to 300mm substrates.

The MegPie can be retrofitted to a variety of standard processing tools in hours.

About ProSys, Inc.

Founded in 1996, ProSys, Inc. delivers innovative megasonic technology with exceptional performance at a competitive cost for manufacturers of sub-micron contamination-sensitive products. ProSys, Inc. is headquartered at 1745 Dell Avenue in Campbell, California. Phone: 408-871-2500. Website: www.prosysmeg.com.