FOR RELEASE JULY 12, 2004

CONTACT: Janet Basler
Product Systems Inc.
408-871-2500 (voice)
408-871-2504 (fax)
sales@prosysmeg.com


PROSYS SHIPS A FULL LINE OF CLEANING AND ENHANCED CHEMICAL DEVELOPING VERSIONS OF MEGPIE™ SINGLE WAFER MEGASONIC TRANSDUCER

The ProSys MegPie Single Wafer acoustic transducer is now available in 100 to 300mm wafer sizes and in solvent compatible packages for develop applications. The MegPie has achieved 99% removal of sub 100nm particles in less than 60 seconds at low powers and has both improved develop and lift off processes.

San Francisco, CA July 12, 2004 - ProSys Inc., the leader in advancing Megasonic transducer technology and products, today unveiled the ProSys MegPie Transducer, an innovative single wafer transducer for applying acoustic energy to a horizontally rotating substrate. This “patent allowed” technology enables a user to apply the acoustic energy directly, perpendicularly, to the surface, thereby concentrating the acoustic Cavitation effects between the substrate and transducer.

The concentrated acoustic energy assists the sono-chemistry reactions that remove particles by applying a uniform field of energy. The uniform field of energy is a direct result of the innovative “Pie” shape of the transducer.

“Our goal was to design a transducer that would provide a uniform field of acoustic energy to a rotating substrate in package that could integrate into any OEM’s tool and be adapted to tools in the field,” said Mark Beck, founder and CEO of ProSys. “This transducer is a cost effective alternative that will enable Megasonics to be adapted to almost any spinning wafer.”

The MegPie achieves radial power uniformity from center to edge with a variable watt density of 0 – 3 Watts/cm2. The transducer is HF, Solvent, and pH 1-13 compatible and can be purchased in standard sizes for cleaning 100mm to 300mm substrates.

The MegPie can be retrofitted to a variety of standard processing tools in hours.

About ProSys, Inc.

Founded in 1996, ProSys, Inc. delivers innovative megasonic technology with exceptional performance at a competitive cost for manufacturers of sub-micron contamination-sensitive products. ProSys, Inc. is headquartered at 1745 Dell Avenue in Campbell, California. Phone: 408-871-2500. Website: www.prosysmeg.com.