July 10, 2008
Product Systems Inc.
408-871-2500 (Voice)
408-871-2504 (Fax)
www.prosysmeg.com
Product Systems, Inc. Expands Megasonic Technology Patent Portfolio
CAMPBELL, CA July 10, 2008 - ProSys, Inc., the leader in advancing Megasonic Process technology, has expanded its IP portfolio with the granting of two additional patents. ProSys now holds a total of 28 Patents for Megasonic Transducer Design, RF Transfer, Radial Uniformity and Megasonic Metrology.
One of the patents, for Sonoluminessence Characterization of process fluid, is an enabling Megasonic Metrology technology that will enable a new family of process control products.
“The granting of this patent will allow us to bring this enabling technology to the marketplace in the form of two new product groups.” said Mark Beck, Founder and CEO of ProSys. “The Analysis CT Cell enables the investigation of and measurement of Cavitation Performance of almost any process fluid, this is very useful in determining how a fluid will perform prior to implementation into the process. The InLine CT Cell samples fluid from the recirculation or supply loop and provides “real time” monitoring of fluid cavitation behavior, and allows for setting of process windows and alarms.”
“ProSys has been using this CT technology to assist customers in understanding the behavior of their Process Fluid in a Megasonic field” stated Eric Liebscher, Engineering Manager of ProSys. “With the grant of this patent we can now provide the tools for our customers to accomplish this characterization in-house”.
The second patent granted was a foreign allowance for Radial Uniformity. Radial power uniformity is a key feature of the MegPie Megasonic Transducer for single substrate applications.
Since 2003, MegPie Transducers have been in use worldwide for Post CMP, Pre-Bond, TS Via, and Residual Cleans as well as Thick Film Develop/Etch and other Megasonic Enhanced Processes.
About ProSys, Inc.
Founded in 1996, Product Systems Inc. (dba ProSys, Inc) delivers innovative Megasonic
technology with exceptional performance at a competitive cost to manufacturers of sub-
micron contamination-sensitive products. ProSys, Inc. is headquartered at 1745 Dell
Avenue in Campbell, California. Phone: 408-871-2500. Website: www.prosysmeg.com .
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