July 10, 2006

CONTACT: Kathryn Theodore
Product Systems Inc.
408-871-2500 (Voice)
408-871-2504 (Fax)
www.prosysmeg.com

PROSYS SHIPS THE PATENTED RADIAL UNIFORM MEGPIE™ SINGLE WAFER MEGASONIC TRANSDUCER IN 400KHz MODELS

San Francisco, CA July 10, 2006 - ProSys Inc., the leader in advancing Megasonic transducer technology and products, today unveiled the ProSys MegPie Transducer in low frequency version operating at 400-500 kHz. This patented technology enables a user to apply a uniform field of acoustic energy to the surface, thereby concentrating the acoustic Cavitation effects between the substrate and transducer.

“The 400kHz region has proven to be very effective at removing the large and small particles. We moved to 1MHz and higher frequencies to remove the smaller particles and limit damage. We missed the mid-range where there are many films that can be cleaned fast” said Mark Beck, founder and CEO of ProSys. “The mid-range frequency is effective for cleaning a broad range of particle sizes”

The MegPie achieves radial power uniformity from center to edge with a variable watt density of 0 – 3 Watts/cm2. The transducer is HF compatible and can be purchased in standard sizes for cleaning 100mm to 300mm substrates.

The MegPie can be retrofitted to a variety of standard processing tools in hours.

About ProSys, Inc.

Founded in 1996, Product Systems Inc. (dba ProSys, Inc) delivers innovative Megasonic technology with exceptional performance at a competitive cost for manufacturers of sub-micron contamination-sensitive products. ProSys, Inc. is headquartered at 1745 Dell Avenue in Campbell, California. Phone: 408-871-2500. Website: www.prosysmeg.com.