For Release April 12, 2005
CONTACT: Janet Basler
Product Systems Inc.
408-871-2500 (Voice)
408-871-2504 (Fax)
sales@prosysmeg.com
PROSYS SHIPS SAPPHIRE VERSIONS OF MEGPIE™ SINGLE WAFER MEGASONIC TRANSDUCER
The ProSys MegPie Single Wafer acoustic transducer is now available in Sapphire for 100 to 300mm wafer sizes. The Solid Sapphire resonator provides enhanced resistance to the aggressive chemistries while greatly improving the products resistance to wafer breakage damage. The MegPie has achieved 99% removal of sub 100nm particles in less than 60 seconds at low powers and has improved both develop and lift off processes.
Munich, April 12, 2005- ProSys Inc., the leader in advancing Megasonic transducer technology and products, today unveiled the ProSys MegPie Transducer with a solid, pure, Sapphire resonator. The MegPie transducer is utilized for applying acoustic energy to a rotating substrate. The MegPie technology enables a user to apply the acoustic energy directly, perpendicular, to the surface, thereby concentrating the acoustic Cavitation effects between the substrate and transducer. The Patented MegPie shape insures uniform power densities and exposure of the substrate surface.
The concentrated acoustic energy assists the sono-chemical reactions that remove particles by applying a uniform field of energy. "The uniform field of energy can be aggressive in the presence of certain chemistries, the Sapphire resonator makes this product very rugged" says Mark Beck, CEO.
"Our goal is to provide a transducer that will operate in any chemistry and withstand the damage that can occur from a breaking wafer", said Mark Beck, founder and CEO of ProSys. "This transducer is a cost effective alternative that will enable Megasonics to be adapted to almost any spinning wafer."
The MegPie achieves radial power uniformity from center to edge with a variable watt density of 0 – 3 Watts/cm2. The transducer is HF, Solvent, and pH 1-13 compatible and can be purchased in standard sizes for cleaning 100mm to 300mm substrates.
About ProSys, Inc.
Founded in 1996, ProSys, Inc. delivers innovative megasonic
technology with exceptional performance at a competitive cost
for manufacturers of sub-micron contamination-sensitive products.
ProSys, Inc. is headquartered at 1745 Dell Avenue in Campbell,
California. Phone: 408-871-2500. Website: www.prosysmeg.com.
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