The following two technical briefs cover some basic principles of megasonics. The first article provides an overview of megasonic cleaning. The second is an explanation of the boundary layer in relation to megasonic cleaning and how minimizing the boundary layer is essential to optimal particulate removal and transport, high chemistry refresh rates, and chemical access to surface features.
What Is Megasonic Cleaning?
What Is the Boundary Layer in Relation to Megasonic Cleaning?