ProSys - Quartz Megasonic System

Quartz Megasonic Cleaning System

The ProSys Quartz Megasonic Tank System is a complete quartz direct-Megasonic cleaning system ready to install in your process station. Direct Megasonic is more uniform than indirect and achieves the same pressure in the bath, with 60% less input power.

•	Single-wafer to dual 200mm (300mm and larger systems available)

•	All-quartz wetted surfaces

•	Replaceable and repairable transducer array

•	4-sided weir overflow

•	Bottom-end fluid input

•	Quartz bottom-mounted transducer

•	Easy to install and operate

•	Interfaces with the IMPulse RF controller

•	Lower capital cost than indirect

•	Lower installation and use cost than indirect

•	Better uniformity than indirect Megasonic systems

•	Direct at 1.6 Watt/cm2 = indirect at 4 Watt/cm2

•	Standard operating frequency: 925 kHz; other frequencies available upon request

•	Power densities up to 2 Watts/cm2

•	Process fluid temperatures to 60°C

•	Standard sizes available: single-wafer to dual 200mm

•	Custom sizes designed and built in weeks

•	Special sizes available for solar and 450mm

•	Interfaces with the IMPulse RF electronics

Quick Response

Technical Information

Specifications

Product Note
with technical specifications and drawings (PDF)