ProSys -Plate Array Only

Plate Array Megasonic Transducer

The ProSys Plate Array is a Megasonic transducer packaged and ready to bolt onto a process tank to form the bottom. It is available in sizes from small single-wafer to 450mm. Direct coupling of acoustic energy to your process chemistry improves uniformity and cleans at a much lower power than Indirect designs.

•	Patented metallic bond and RF connections to the crystals

•	Resonators are available in quartz, stainless steel, and sapphire

•	RF matching network located in the housing for improved transmission efficiency

•	Redundant RTD temperature monitoring of the transducer for improved reliability

•	Sealed and ready to bolt to a tank

•	Available in standard sizes for single and dual 100mm to 450mm

•	Easy to repair if required

•	Crystal-to-resonator bond is acoustically superior to an epoxy bond

•	Robust, reliable design and construction

•	Direct design provides better uniformity than indirect solutions

•	60% lower RF power usage when compared to indirect designs

•	Operating frequencies from 400 kHz to 3 MHz

•	Power densities up to 3 Watts/cm2

•	Process fluid temperatures to 60°C

•	Standard sizes available

•	Custom sizes design and built in weeks

•	Special sizes available for solar and 450mm

•	Interfaces with the IMPulse RF electronics

•	Wafer cleaning	•	Lift off

•	Post-CMP cleaning	•	Resist strip

•	BOEL cleaning	•	Mold and imprint master cleaning

•	Solar cleans	•	Etch enhancement

•	Mask cleaning	•	Plating assist and bubble removal

Quick Response

Technical Information

Specifications

Processes Supported

Product Note
with technical specifications and drawings (PDF)