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| The ProSys Immersible Array is a Megasonic transducer that is designed to install into an existing process tank in minutes. The addition of acoustic energy to a processing bath can improve the efficiency and reduce the process time. Products are available that are compatible with solvents, acids, or bases. |
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Sealed enclosure made with stainless steel, PTFE, Kynar/PVDF, and CPVCC
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Resonators are made with quartz, stainless steel, and sapphire
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Patented crystal-to-resonator bond process
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Patented RF connection to the crystals |
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Redundant RTD temperature monitoring of the transducer for improved reliability |
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The array is designed to be easily repaired if required |
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The crystal-to-resonator bond is accoustically superior to an epoxy bond |
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The design and construction are robust and reliable |
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The direct design provides better uniformity than indirect solutions |
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60% lower RF power usage when compared to indirect designs |
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Standard operating frequency: 925 kHz; other frequencies available upon request
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Power densities up to 2 Watts/cm2
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Process fluid temperatures to 60°C
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Standard sizes available |
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Custom sizes designed and built in weeks |
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Special sizes available for solar and 450mm |
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Interfaces with the IMPulse RF electronics |
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Wafer cleaning |
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Lift off |
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Post-CMP cleaning |
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Resist strip |
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BOEL cleaning |
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Mold and imprint master cleaning |
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Solar cleans |
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Etch enhancement |
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Mask cleaning |
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Plating assist and bubble removal |
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