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| This complete quartz, direct-Megasonic cleaning system is available in configurations for processing 300mm, 450mm and larger substrates. The system uses multiple IMPulse RF controllers, and it is ready to install in your process station. Direct Megasonic is more uniform than indirect and achieves the same pressure in the process fluid with 60% less input power. |
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Single and dual 300mm, 450mm and larger systems available |
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All-quartz wetted surfaces |
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Replaceable and repairable transducer array |
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4-sided weir overflow |
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Bottom sides fluid input |
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Quartz bottom-mounted transducer |
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Easy to install and operate |
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Uses multiple IMPulse RF controllers daisy chained together in sync-bus |
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Lower capital cost than indirect Megasonic cleaning systems |
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Lower installation and use cost than indirect |
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Better uniformity than indirect |
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Direct at 1.6 Watt/cm2 = indirect at 4 Watt/cm2 |
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Standard operating frequency: 925 kHz; other frequencies available upon request |
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Power densities up to 2 Watts/cm2 |
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Process fluid temperatures to 60°C |
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Custom sizes designed and built in weeks |
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Special sizes available for solar |
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Interfaces with the IMPulse RF electronics |
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| Quick Response |
Contact Us
for quick response on a quote or for additional product information
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| Technical Information |
Specifications
Product Note
(PDF)
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| Related Products |
IMPulse RF Power Supply with Integrated Microcontroller info
Tank Megasonic Cleaning Systems info
Quartz Megasonic Cleaning System info
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