For Immediate Release
July 10, 2008
CONTACT: Kathryn Theodore
Product Systems Inc.
Product Systems Inc. Announces the Scaling of the MegPie to 450mm
CAMPBELL, CA July 10, 2008 – ProSys Inc., the leader in advancing Megasonic transducer technology, today unveiled the ProSys 450mm MegPie V3 Transducer. This extension of the production proven 300mm MegPie V3 features the same patented radial uniformity as well as Process Parameter controls that have made the MegPie Megasonic Technology a mainstay in many applications.
“The 450mm MegPie V3 will enable OEMs to quickly and easily port their existing MegPie processes from 300mm, the process controls and setup parameters are identical,” said Mark Beck, Founder and CEO of ProSys. “Of course we also offer Dual Zone Bridge Models (300/450mm) as we did with the 200/300mm transition tools.”
“As substrate diameters increase, so do the requirements for uniform Megasonic Enhanced processing,” said Eric Liebscher, Engineering Manager of ProSys. “The MegPie design provides a very easy to integrate solution that has been scaled to meet the 450mm process challenges to come.”
Since 2003, MegPie Transducers have been in use worldwide for Post CMP, Pre-Bond, TS Via, and Residual Cleans as well as Thick Film Develop/Etch and other Megasonic Enhanced Processes.
The MegPie achieves radial power uniformity from center to edge. The transducer is available in a choice of materials and can be purchased in standard sizes for Megasonic enhanced processing of 100mm to 450mm substrates.
The MegPie can be retrofitted to a variety of standard processing tools in hours.
About ProSys, Inc.
Founded in 1996, Product Systems Inc. (dba ProSys, Inc) delivers innovative Megasonic technology with exceptional performance at a competitive cost for manufacturers of sub-micron contamination-sensitive products. ProSys, Inc. is headquartered at 1745 Dell Avenue in Campbell, California. Phone: 408-871-2500. Website: www.prosysmeg.com.