For Immediate Release
October 21, 2010
CONTACT: Kathryn Theodore
Product Systems Inc.
408-871-2500 (Voice)
408-871-2504 (Fax)
www.prosysmeg.com
ProSys Receives a Second Patent for its Metrology Tool for Characterizing Cleaning Chemistries

CAMPBELL, California, October 21, 2010 — ProSys Inc., the leader in advancing megasonic cleaning technology and products, today revealed that they have received a second U.S. patent for their CT CellTM Megasonic Chemistry Characterization Tool. The CT Cell is used to correlate the sonoluminecse output of a fluid versus the acoustic power applied. The CT Cell may also be used as an in-line metrology tool to monitor process fluids properties in real time.

“With cavitation being acknowledged as the primary cleaning and damage mechanism, scientists need to know how their cleaning chemistries will behave in the presence of an acoustic field. With a processes particle removal efficiency (PRE) and damage characteristics that are optimized based upon sonoluminescence, the CT Cell can be used to monitor the process fluid to make sure process parameters are being met,” said Mark Beck, Founder and CEO of ProSys. “Cavitation density and uniformity is the key to a well behaved cleaning process, and the CT Cell will help users stay in control of their processes,” he stated.

About ProSys, Inc.

Founded in 1996, Product Systems Inc. (ProSys) delivers innovative megasonic technology with exceptional performance at a competitive cost for manufacturers of sub-micron contamination-sensitive products. Manufacturers in the integrated circuit, hard drive, raw silicon, mask, solar, flat panel display, OLED and other industries affected by contamination have turned to ProSys megasonic technology to met their stringent cleaning requirements.

With an international presence, ProSys has driven the advancement of megasonic technology and sets the industry standard when it comes to the design, engineering, and manufacturing of wet-process critical-cleaning systems.

ProSys, Inc. is headquartered at 1745 Dell Avenue in Campbell, California. Phone: 408-871-2500. Website: www.prosysmeg.com.
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