|For Immediate Release
March 3, 2011
CONTACT: Kathryn Theodore
Product Systems Inc.
ProSys Announces Delivery of 300/450 MegPie to Europe
CAMPBELL, California, March 3, 2012 — ProSys Inc., the leader in advancing Megasonic transducer technology, today announced the delivery of a 300/450mm Dual Zone V3 MegPie Transducer to an OEM customer in Europe.
“The 300/450mm Dual Zone V3 MegPie will enable OEMs to quickly and easily port their existing MegPie process from 300mm, because the process controls and setup parameters are identical,” said Mark Beck, founder and CEO of ProSys. “This is our flagship sapphire-faced transducer that has proven to be particle neutral, with our patent ending radial uniform fluid manifold.”
“As substrate diameters increase, so do the requirements for uniform Megasonic-enhanced processing,” said Eric Liebscher, Engineering Manager of ProSys. “The MegPie design provides a very easy-to-integrate solution that has been scaled to meet the 450mm process challenges to come,” he stated. The MegPie can be retrofitted to a variety of standard processing tools in hours.
Since 2003, MegPie transducers have been in use worldwide for post-CMP, pre-bond, TS via, and residual cleans as well as for thick film develop/etch and other Megasonic-enhanced processes.
The MegPie family achieves radial power uniformity from center to edge. MegPie transducers are available in a choice of materials and can be purchased in standard sizes for Megasonic-enhanced processing of 50mm to 520mm substrates.
About ProSys, Inc.
Founded in 1996, Product Systems Inc. (dba ProSys, Inc.) delivers innovative megasonic technology with exceptional performance at a competitive cost for manufacturers of submicron contamination-sensitive products.
ProSys, Inc. is headquartered at 1745 Dell Avenue in Campbell, California. Phone: 408-871-2500. Website: www.prosysmeg.com.