Powerful Results for Advanced Processes & Critical Cleaning
ProSys Megasonic cleaning systems and technology can enable you to:
| • | Quickly, safely, and effectively clean contamination-sensitive products |
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| • | Improve your removal efficiency to above 99% |
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| • | Reduce process time |
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Using high-frequency acoustic energy, our advanced megasonics technology enables you to more tightly control your process and to make it faster and more efficient. |
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Problems we solve include:
| • | FEOL and BEOL cleans |
| • | Post-CMP/polish cleaning |
| • | Photoresist develop and strip, including thick resist |
| • | TSV & HAR cleaning and residual polymer removal |
| • | LIGA/MEMS process applications |
| • | Pre-bond cleaning |
| • | Mask cleaning |
| • | Solar process applications |
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| NEWS |
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ProSys MegPie™ V3 Shipments Surpass 1,100 Systems read more ProSys Ships Direct Megasonic System that Replaces Curved-Crystal Systems read more ProSys Ships Direct Megasonic System Delivering Substantial Benefits to Customers. read more ProSys Announces Shipment of Direct Megasonic System Replacement for Sunburst Turbo System. read more |
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ProSys Direct Megasonic System with Patented Array Technology Delivers the Results You Need. Improved device yield, lower cost of ownership, and competitive capital expenditure all add up to an attractive payback. |
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learn more |
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