Powerful Results for Advanced Processes & Critical Cleaning
ProSys Megasonic cleaning systems and technology can enable you to:
| • | Quickly, safely, and effectively clean contamination-sensitive products |
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| • | Improve your removal efficiency to above 99% |
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| • | Reduce process time |
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Using high-frequency acoustic energy, our advanced megasonics technology enables you to more tightly control your process and to make it faster and more efficient. |
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Problems we solve include:
| • | FEOL and BEOL cleans |
| • | Post-CMP/polish cleaning |
| • | Photoresist develop and strip, including thick resist |
| • | TSV & HAR cleaning and residual polymer removal |
| • | LIGA/MEMS process applications |
| • | Pre-bond cleaning |
| • | Mask cleaning |
| • | Solar process applications |
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| NEWS |
ProSys MegPie™ V3 Shipments Surpass 1,100 Systems read more ProSys Ships Direct Megasonic System that Replaces Curved-Crystal Systems read more ProSys Announces Shipment of Direct Megasonic System Replacement for Sunburst Turbo System. read more |
ProSys Direct Megasonic System with Patented Array Technology Delivers the Results You Need. Improved device yield, lower cost of ownership, and competitive capital expenditure add up to an attractive payback. |
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