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Powerful Results for Advanced Processes & Critical Cleaning
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ProSys Megasonic cleaning systems and technology can enable you to:
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• Quickly, safely, and effectively clean contamination-sensitive products
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• Improve your removal efficiency to above 99%
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• Reduce process time
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Using high-frequency acoustic energy, our advanced megasonics technology enables you to more tightly control your process and to make it faster and more efficient.
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Problems we solve include:
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• FEOL and BEOL cleans
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• Post-CMP/polish cleaning
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• Photoresist develop and strip, including thick resist
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• TSV & HAR cleaning and residual polymer removal
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• LIGA/MEMS process applications
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• Pre-bond cleaning
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• Mask cleaning
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• Solar process applications
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<empty>NEWS<empty>
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ProSys MegPie™ V3 Shipments Surpass 1,100 Systems
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read more
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ProSys Ships Direct Megasonic System that Replaces Curved-Crystal Systems
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read more
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ProSys Announces Shipment of Direct Megasonic System Replacement for Sunburst Turbo System.
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read more
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ProSys Direct Megasonic System
with Patented Array Technology
Delivers the Results You Need.
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Improved device yield,
lower cost of ownership, and
competitive capital expenditure
add up to an attractive payback.
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© 2019 ProSys Inc.		      
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