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Powerful Results for Advanced Processes & Critical Cleaning
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ProSys Megasonic cleaning systems and technology can enable you to:
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Quickly, safely, and effectively clean contamination-sensitive products
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Improve your removal efficiency to above 99%
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Reduce process time
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Using high-frequency acoustic energy, our advanced megasonics technology enables you to more tightly control your process and to make it faster and more efficient.
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Problems we solve include:
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FEOL and BEOL cleans
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Post-CMP/polish cleaning
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Photoresist develop and strip, including thick resist
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TSV & HAR cleaning and residual polymer removal
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LIGA/MEMS process applications
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Pre-bond cleaning
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Mask cleaning
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Solar process applications
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<empty>NEWS<empty>
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ProSys Ships Direct Megasonic System that Replaces Curved-Crystal Systems
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read more
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ProSys ships Direct Megasonic system delivering substantial benefits to customers.
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read more
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ProSys announces shipment of Direct Megasonic System replacement for Sunburst Turbo system.
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read more
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ProSys Direct Megasonic System
with Patented Array Technology Delivers the Results You Need.

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Improved device yield, lower cost
of ownership, and competitive
capital expenditure all add up to
an attractive payback.

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learn more

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© 2018 ProSys Inc.
     
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