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ProSys Megasonic cleaning systems and technology can enable you to:

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Quickly, safely, and effectively clean contamination-sensitive products
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Improve your removal efficiency to above 99%
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Reduce process time
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Using high-frequency acoustic energy, our advanced megasonics technology enables you to more tightly control your process and to make it faster and more efficient. |

Problems we solve include:



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FEOL and BEOL cleans
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Post-CMP/polish cleaning
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Photoresist develop and strip, including thick resist
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TSV & HAR cleaning and residual polymer removal

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LIGA/MEMS process applications
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Pre-bond cleaning
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Mask cleaning
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Solar process applications
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NEWS
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ProSys MegPie™ V3 Shipments Surpass 1,100 Systems

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ProSys Ships Direct Megasonic System that Replaces Curved-Crystal Systems

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ProSys Announces Shipment of Direct Megasonic System Replacement for Sunburst Turbo System.

read more

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ProSys Direct Megasonic System
with Patented Array Technology
Delivers the Results You Need.

Improved device yield,
lower cost of ownership, and
competitive capital expenditure
add up to an attractive payback.
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