- HOME
- COMPANY
- TECHNOLOGY
- NEWS
- PRODUCTS
- 300mm+ Megasonic System
- 450mm MegPie
- Bowl Meg
- Custom MegPie
- Custom Systems
- Direct Megasonic Batch Systems
- Dual Zone MegPie
- Dual Zone MegPie 300/450
- Gama Meg Replacement
- Immersible Array
- IMPulse RF Power Supply with Microcontroller
- MegPie DNS Brush Replacement Kit
- MegPie Transducers
- Phaser Arrays
- Plate Array Only
- Quartz Megasonic System
- Sapphire MegPie
- Solar MegBar
- Stainless Steel MegPie
- Sunburst Array
- Tabletop System
- Tank Options
- NEW PRODUCTS
- CONTACT US
Powerful Solutions for Critical Cleaning
ProSys Megasonic cleaning systems and technology can enable you to:
| • | Quickly, safely, and effectively clean contamination-sensitive products |
|
|
| • | Improve your removal efficiency to above 99% |
|
|
| • | Reduce process time |
|
|
Using high-frequency acoustic energy, our advanced megasonics technology enables you to more tightly control your process and to make it faster and more efficient. |
|
Problems we solve include:
| • | FEOL and BEOL cleans |
| • | Post-CMP/polish cleaning |
| • | Thick resist develop such as SU-8™ |
| • | TSV process enhancement and residual glue removal |
| • | LIGA/MEMS process enhancements |
| • | Solar process enhancement |
|
|
Working with ProSys offers:
| • | A wide range of solutions for both single wafer and batch cleaning. |
| • | Custom Megasonic cleaning system designs to solve a variety of difficult contamination-sensitive cleaning issues. |
| • | Proprietary Direct Technology that improves reliability, uptime and yields. |
| • | Repair and replacement services for your existing Megasonic systems. (details) |
| • | A high level of support – including help with process optimization. |
| • | Access to the latest developments in cleaning and continual advancements in megasonic technology. |
|
|
| NEWS |
ProSys Announces the MegPie Retrofit Kit for DNS 80A/B Brush Scrubbers read more ProSys Announces Delivery of 300/450 MegPie to Europe read more |
| EVENTS |
Semicon Europa, See us at Stand no. 1.746 SPS-Europe BV. details |
|
©1997-2014 ProSys Inc.